Format:
XVII, 615 S.
,
Ill., zahlr. graph. Darst.
ISBN:
1558994742
Series Statement:
Materials Research Society: Materials Research Society symposia proceedings 567
Language:
English
Subjects:
Physics
Keywords:
Siliciumdioxid
;
Dünne Schicht
;
ULSI
;
Konferenzschrift
Author information:
Huff, Howard R.
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