UID:
almahu_9949697888302882
Format:
1 online resource (635 p.)
ISBN:
1-282-76946-4
,
0-08-094654-2
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9786612769467
,
1-282-25323-9
,
9786612253232
,
0-8155-1899-4
,
1-59124-151-0
Series Statement:
Semiconductor safety series
Content:
Interwoven within our semiconductor technology development had been the development of technologies aimed at identifying, evaluating and mitigating the environmental, health and safety (EH&S) risks and exposures associated with the manufacturing and packaging of integrated circuits. Driving and advancing these technologies have been international efforts by SEMI's Safety Division, the Semiconductor Safety Association (SSA), and the Semiconductor Industry Association (SIA). The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the
Note:
Description based upon print version of record.
,
Front Cover; About the Editor; Semiconductor Safety Handbook: Safety and Health in the Semiconductor Industry; Copyright Page; Preface; Contents; Chapter 1. Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies; 1.0 INTRODUCTION; 2.0 REVIEW AND DISCUSSION OF SEMICONDUCTOR INDUSTRY WORK INJURIES AND ILLNESSES; 3.0 REVIEW AND DISCUSSION OF EPIDEMIOLOGIC INVESTIGATIONS; 4.0 CONCLUSION; REFERENCES; Chapter 2. Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention; 1.0 INTRODUCTION
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2.0 EXTERNAL AND INTERNAL SOURCES AFFECTING COMPLIANCE3.0 DETECTION OF ENVIRONMENTAL COMPLIANCE AND MANAGEMENT ISSUES; 4.0 CORRECTIVE ACTION FOR ENVIRONMENTAL COMPLIANCE AND MANAGEMENT ISSUES; 5.0 MITIGATION AND PREVENTION OF ENVIRONMENTAL COMPLIANCE AND MANAGEMENT ISSUES; 6.0 ADOPTING PROACTIVE ENVIRONMENTAL STRATEGIES; 7.0 GOING BEYOND COMPLIANCE-HOLISTIC CONSIDERATIONS; REFERENCES AND SOURCE MATERIALS; APPENDIX A: EPA POLICY ON ENVIRONMENTAL AUDITING; APPENDIX B: ENVIRONMENTAL COMPLIANCE AUDIT CHECKLIST; STEP I: BASE FINE; STEP II: AGGRAVATING FACTORS IN SENTENCING
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STEP III: FACTORS FOR ENVIRONMENTAL COMPLIANCESTEP IV: GENERAL LIMITATIONS; STEP V: PROBATION - ORGANIZATIONS; Chapter 3. Chemical Hazards in Semiconductor Operations; OVERVIEW; 1.0 PHOTOLITHOGRAPHY; 2.0 WET ETCH; 3.0 DRY ETCH; 4.0 IMPLANT/DIFFUSION; 5.0 CLEANING; 6.0 METALLIZATION; 7.0 MAINTENANCE ISSUES; 8.0 USE OF GASES; Chapter 4. Industrial Hygiene; 1.0 INTRODUCTION; 2.0 INDUSTRIAL HYGIENE MONITORING; 3.0 PERSONAL PROTECTIVE EQUIPMENT; 4.0 ODOR IDENTIFICATION; 5.0 RECORDKEEPING; ACKNOWLEDGMENTS; REFERENCES; Chapter 5. Electrical Hazards; 1.0 INTRODUCTION; 2.0 WHERE DO WE START?
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3.0 TERMINOLOGY4.0 HUMAN EFFECTS; 5.0 SCENARIO OF AN ELECTRICAL SHOCK; 6.0 WHAT REALLY HAPPENS?; 7.0 REPORTING; 8.0 COMMON ELEMENTS OF ELECTRICAL ACCIDENTS/ACCIDENT INVESTIGATION; 9.0 ELECTRICAL HAZARD MANAGEMENT; 10.0 TYPICAL ELECTRICAL HAZARDS; 11.0 HAZARD-BASED, SAFETY PLANNING; 12.0 LOCKOUT/TAGOUT; 13.0 ELECTRICAL SAFETY COOKBOOK-What can be done? What can I do?; REFERENCES; Chapter 6. Radiation Safety; 1.0 INTRODUCTION; 2.0 EXTREMELY LOW FREQUENCY ELECTROMAGNETIC FIELDS (ELF/EMF); 3.0 RADIOFREQUENCY/MICROWAVE RADIATION; 4.0 LASERS; 5.0 ULTRAVIOLET RADIATION; 6.0 IONIZING RADIATION
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ACKNOWLEDGMENTSREFERENCES; Chapter 7. Recognition, Evaluation and Control of Some Plasma Processing Hazards; CHEMICAL SAFETY MANAGEMENT IN A NUTSHELL; 1.0 INTRODUCTION; 2.0 HAZARD EVALUATION; 3.0 PROCESS HAZARD REVIEW; 4.0 OTHER MECHANISMS TO ADDRESS EQUIPMENT SAFETY CONCERNS; 5.0 GAS CHEMICAL SAFETY; 6.0 TOXICOLOGY; 7.0 SOURCES OF INFORMATION; REFERENCES; ADDITIONAL REFERENCES; Chapter 8. Fire Protection Technology for Semiconductor Operations; 1.0 INTRODUCTION; 2.0 SITE SELECTION; 3.0 CONSTRUCTION; 4.0 AIR HANDLING SYSTEMS; 5.0 SPRINKLER PROTECTION; 6.0 WATER SUPPLIES; 7.0 SUPERVISION
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8.0 CHEMICAL HANDLING
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English
Additional Edition:
ISBN 0-8155-1418-2
Language:
English
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