In:
Journal of the Vacuum Society of Japan, The Vacuum Society of Japan, Vol. 60, No. 9 ( 2017), p. 362-364
Type of Medium:
Online Resource
ISSN:
1882-2398
,
1882-4749
Uniform Title:
生産規模でのプラズマイオン成膜プロセスの比較
DOI:
10.3131/jvsj2.60.362
Language:
English
,
Japanese
Publisher:
The Vacuum Society of Japan
Publication Date:
2017
detail.hit.zdb_id:
2397282-8
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