Format:
13
ISSN:
2166-2746
In:
Journal of vacuum science and technology / B, New York, NY : Inst., 1983, Bd. 34 (2016), 6, Seite 06K202, insges. 13 S., 2166-2746
In:
volume:34
In:
year:2016
In:
number:6
In:
extent:13
Language:
English
Author information:
Rangelow, Ivo W.
Author information:
Staaks, Daniel
Author information:
Ahmad, Ahmad 1975-
Author information:
Lenk, Steve 1984-
Author information:
Ivanov, Tzvetan 1973-
Author information:
Kästner, Marcus 1986-
Author information:
Lenk, Claudia 1982-
Author information:
Dallorto, Stefano 1990-
Author information:
Guliyev, Elshad 1968-
Author information:
Hofmann, Martin 1989-
Author information:
Volland, Burkhard E. 1970-
Bookmarklink