In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 17, No. 6 ( 1999-11-01), p. 2827-2829
Abstract:
A novel electron detection scheme for use in scanning electron microscopes is presented. The detector features enhanced imaging of topographical and especially high-aspect-ratio structures by selective detection of on-axis electrons. It consists of a magnetostatic beam separator which splits the on-axis backscattered and secondary electrons from the primary electron beam without causing first-order chromatic aberrations. The design concept has been proven by experimental evaluations which demonstrate the enhanced imaging capabilities of this new detector.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1999
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0
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