In:
Applied Optics, Optica Publishing Group, Vol. 59, No. 13 ( 2020-05-01), p. 3910-
Kurzfassung:
Tolerancing is an important step toward the fabrication of high-quality
and cost-effective lens surfaces. It is critical for wafer-level optics, when up to tens of thousands microlenses are fabricated in
parallel and whose surfaces cannot be formed individually. However, approaches developed for macro-optics cannot be directly transposed
for microlenses because of differences in fabrication and testing techniques. In particular, microlens surfaces are usually limited to
conical surfaces. Here, we study the connection between the microlens optical performance and the form of its surface, suggesting surface
form representations suited for tolerancing purposes. Then, we compare them with common representations for tolerancing real optical systems.
Measured surface forms of microlenses are also provided to make the tolerancing procedure realistic. In addition, we propose term
definitions for micro-optics, complements to typical terms for macro-optics, to ease the communication between optical designers and
manufacturers. Based on the results presented in this paper, guidelines are proposed for tolerancing microlenses. We suggest
applying them as a first step toward a more effective and comprehensive tolerancing procedure.
Materialart:
Online-Ressource
ISSN:
1559-128X
,
2155-3165
Sprache:
Englisch
Verlag:
Optica Publishing Group
Publikationsdatum:
2020
ZDB Id:
207387-0
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