In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 4R ( 1996-04-01), p. 2205-
Abstract:
The pyroelectric responses of a multilayer, thin-film pyroelectric detector under both isolated and heat-sink boundary conditions are completely analyzed. Exact mathematical solutions of the heat flow equation are derived. The multilayer detector is composed of pyroelectric layer/thermal isolation layer/silicon substrate. The analytical result shows that when the thickness of the isolation layer is increased, the detectivity, D * , at low frequencies will be improved, and as the thickness of the pyroelectric layer is decreased, the high-frequency response is improved. D * of a detector with 1 µm PLZT((Pb, La)(Zr, Ti)O 3 )/10 µm porous silica/0.5 mm silicon is higher than that of the detector with 10 µm PLZT/1 µm porous silica/0.5 mm silicon in a wide frequency range. In order to achieve better performance of a multilayer thin-film detector, the thicknesses of the two layers should be chosen very carefully. This analysis provides a guide for the preparation of multilayer thin-film pyroelectric detectors.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.2205
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1996
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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