In:
Journal of Applied Physics, AIP Publishing, Vol. 109, No. 5 ( 2011-03-01)
Abstract:
Self-organized nano-cone arrays are fabricated on Si (100) by means of Ar+ ion bombardment at normal incidence with ion energy of 1.5 keV and current density of 1000 µA cm−2. The nano-structured Si surface appears black as seen by the naked eye. The measured reflectance of the surface is less than 11% over the wavelength range from 350 to 2000 nm as compared to that of & gt;∼30% for the polished Si. An enhancement of more than 25% in absorption is observed in this region. The cones are densely distributed over the surface with an average height of ∼350 nm and base width of ∼250 nm. Incorporation of metal atoms such as Fe and Cr is found to be mandatory for the formation of the nano-structures during ion bombardment. High-resolution electron spectra show that for each cone, the apex is metal-enriched, and the rest is nearly free of metal atoms, showing good crystallinity with the same crystallographic orientation as the substrate.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
2011
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
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