In:
Chinese Journal of Liquid Crystals and Displays, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 34, No. 6 ( 2019), p. 564-569
Type of Medium:
Online Resource
ISSN:
1007-2780
Uniform Title:
IGZO-TFT钝化层三元复合结构过孔刻蚀
DOI:
10.3788/YJYXS/2019/34/6
DOI:
10.3788/YJYXS20193406.0564
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2019
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