UID:
almahu_9949592922802882
Format:
XXIV, 754 p. 352 illus., 205 illus. in color.
,
online resource.
Edition:
1st ed. 2022.
ISBN:
9783030972776
Series Statement:
Springer Series in Materials Science, 324
Content:
This book provides a comprehensive introduction to all aspects of low-energy ion-solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion-solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.
Note:
1. Introduction -- 2. Collision processes -- 3. Energy-loss processes and ion range -- 4. Ion beam induced damage -- 5. Sputtering -- 6. Evolution of topography under low-energy ion bombardment -- 7. Ion beam figuring and smoothing -- 8. Ion beam deposition -- 9. Ion beam assisted deposition -- 10. Ion beam sputtering induced glancing angle deposition. .
In:
Springer Nature eBook
Additional Edition:
Printed edition: ISBN 9783030972769
Additional Edition:
Printed edition: ISBN 9783030972783
Additional Edition:
Printed edition: ISBN 9783030972790
Language:
English
Subjects:
Physics
DOI:
10.1007/978-3-030-97277-6
URL:
https://doi.org/10.1007/978-3-030-97277-6
URL:
Volltext
(URL des Erstveröffentlichers)
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