In:
Applied Physics Letters, AIP Publishing, Vol. 109, No. 19 ( 2016-11-07)
Abstract:
We propose to utilize a microfiber string to isolate the tunneling of acoustic waves between a membrane frame and its holder. The displacement response of the membrane frame with and without the vibration isolation is characterized using an optical interferometer. A displacement power suppression of 40 dB is achieved around the fundamental mode frequency of the membrane. We demonstrate that the Q factor of a SiN membrane microresonator with our vibration isolation method can reach 1.78×106 in room temperature.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
2016
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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