In:
MRS Proceedings, Springer Science and Business Media LLC, Vol. 951 ( 2006)
Abstract:
In this work we present both resonators working at ambient conditions and their first application as a biological and physical sensor. Singly- and doubly-clamped resonators of different geometries were realized using active layers of silicon carbide and aluminum nitride. The resonators were excited by magneto-motive actuation. The quality factor reached 350 and 50000 in air and in vacuum (2-5 10 −5 mbar), respectively, which is sufficient for sensing applications in air. The resonance shift caused by mass loadings in the range of picograms and by single biological cells was measured at ambient conditions. Initial non-resonant measurements in liquids such as propanol were performed to investigate the possibility of viscosity measurements in small volumes such as microfluidic channels and droplets.
Type of Medium:
Online Resource
ISSN:
0272-9172
,
1946-4274
DOI:
10.1557/PROC-0951-E05-07
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2006
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