In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 49, No. 8S1 ( 2010-08-01), p. 08JA02-
Abstract:
Combinatorial analysis has been demonstrated for the examination of plasma–surface interactions of poly(ethylene terephthalate) (PET) in terms of chemical bonding state, with X-ray photoelectron spectroscopy (XPS). The chemical bonding states have been investigated for PET films exposed to an argon–oxygen mixture plasma with a density gradient sustained with RF power of 88, 175, and 350 W. The XPS results obtained from three batches of experiments showed a slight increase in the bond peaks caused by the oxidation of which PET with an increase in the product of (ion saturation current) × (plasma exposure time), corresponds to ion dose.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.49.08JA02
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2010
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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