In:
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, American Vacuum Society, Vol. 7, No. 6 ( 1989-11-01), p. 2057-2061
Abstract:
We have fabricated first-order GaAs and InGaAs distributed feedback (DFB) lasers by high-resolution electron beam lithography and dry etching. Basic laser properties as, e.g., the mode structure, the threshold, the temperature drift, the loss at threshold, etc., are evaluated by optical pumping of the structures.
Type of Medium:
Online Resource
ISSN:
0734-211X
,
2327-9877
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1989
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
1475429-0
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