In:
The Journal of the Acoustical Society of America, Acoustical Society of America (ASA), Vol. 118, No. 3_Supplement ( 2005-09-01), p. 1944-1944
Abstract:
High-performance instrumentation grade microphones are a crucial component for aeroacoustic measurements. This paper presents the design, fabrication, and characterization of a MEMS dual-backplate capacitive microphone designed for aeroacoustic applications where small size, high dynamic range, and high bandwidth are key requirements. The microphone features a 230-micron radius, 2-micron air gaps, and a 118-dB dynamic range. Experimental results indicate a sensitivity of 0.282 mV/Pa, a linear response up to 160 dB, a noise floor of 42 dB at 1 kHz in a 1-Hz bin, and a measured resonant frequency of 230 kHz. A flat frequency response was measured up to 20 kHz in an 8.5×8.5−mm square rigid-walled acoustic plane-wave tube. The microphone was designed using an equivalent lumped-element model, simulated using finite-element methods, and fabricated using the SUMMiT V process at Sandia National Laboratories. Details on the acoustic and electrical characterization, fabrication process, and packaging will be described in the presentation.
Type of Medium:
Online Resource
ISSN:
0001-4966
,
1520-8524
Language:
English
Publisher:
Acoustical Society of America (ASA)
Publication Date:
2005
detail.hit.zdb_id:
1461063-2
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