In:
Journal of Applied Crystallography, International Union of Crystallography (IUCr), Vol. 46, No. 5 ( 2013-10-01), p. 1425-1433
Abstract:
Three-dimensional reciprocal space mapping of semipolar (11{\overline 2}2) GaN grown on stripe-patterned r -plane (1{\overline 1}02) sapphire substrates is found to be a powerful and crucial method for the analysis of diffuse scattering originating from stacking faults that are diffracting in a noncoplanar geometry. Additionally, by measuring three-dimensional reciprocal space maps (3D-RSMs) of several reflections, the transmission electron microscopy visibility criteria could be confirmed. Furthermore, similar to cathodoluminescence, the 3D-RSM method could be used in future as a reliable tool to distinguish clearly between the diffuse scattering signals coming from prismatic and from basal plane stacking faults and from partial dislocations in semipolar (11{\overline 2}2) GaN. The fitting of the diffuse scattering intensity profile along the stacking fault streaks with a simulation based on the Monte Carlo approach has delivered an accurate determination of the basal plane stacking fault density. A reduction of the stacking fault density due to the intercalation of an SiN interlayer in the GaN layer deposited on the sidewall of the pre-patterned sapphire substrate has led to an improvement of the optoelectronic properties, influenced by the crystal quality, as has been demonstrated by a locally resolved cathodoluminescence investigation.
Type of Medium:
Online Resource
ISSN:
0021-8898
DOI:
10.1107/S0021889813020438
Language:
Unknown
Publisher:
International Union of Crystallography (IUCr)
Publication Date:
2013
detail.hit.zdb_id:
2020879-0
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