In:
Vakuum in Forschung und Praxis, Wiley, Vol. 14, No. 3 ( 2002-6), p. 133-
Type of Medium:
Online Resource
ISSN:
0947-076X
,
1522-2454
DOI:
10.1002/1522-2454(200206)14:3〈133::AID-VIPR133〉3.0.CO;2-I
Language:
Unknown
Publisher:
Wiley
Publication Date:
2002
detail.hit.zdb_id:
2045181-7
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