In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 14, No. 2 ( 1996-03-01), p. 1527-1530
Abstract:
SnO2 thin films have been grown by radio frequency reactive sputtering method in order to be used as a gas sensor. Subsequently Pt has been added to the SnO2 films to increase the sensitivity to carbon monoxide gas. Two different substrates have been used: rough and mechanically polished alumina. The morphology of the film has been characterized by atomic force microscopy, whereas the chemical composition was analyzed by x-ray photoemission spectromicroscopy. Pt:SnO2 clusters with widths of 500–600 nm were observed on the rough alumina, whereas on the mechanically polished alumina, the Pt:SnO2 film was smoother. X-ray photoemission spectromicroscopy measurements show for Pt:SnO2 films on rough alumina substrates different charging in different areas of the sample. The response curve to carbon monoxide is 30% higher for rough alumina.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1996
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0
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