In:
Technical Physics Letters, Ioffe Institute Russian Academy of Sciences, Vol. 48, No. 15 ( 2022), p. 79-
Abstract:
The possibility of fabrication of 4.6 μm spectral range quantum-cascade laser heterostructures by molecular-beam epitaxy technique with non-selective overgrowth by the metalorganic vapour-phase epitaxy is shown. The active region of the laser was formed on the basis of a heteropair of In 0.67 Ga 0.33 As/In 0.36 Al 0.64 As solid alloys. The waveguide claddings are formed by indium phosphide. The results of surface defects inspection and X-ray diffraction analysis of quantum-cascade laser heterostructures allow to conclude that the structural quality of the heterostructures is high and the estimated value of the root mean square surface roughness does not exceed 0.7 nm. Lasers with four cleaved facets exhibit lasing at room temperature with a relatively low threshold current density of the order of 1 kA/cm 2 . Keywords: superlattices, quantum-cascade laser, epitaxy, indium phosphide.
Type of Medium:
Online Resource
ISSN:
1726-7471
DOI:
10.21883/TPL.2022.15.54274.19014
Language:
English
Publisher:
Ioffe Institute Russian Academy of Sciences
Publication Date:
2022
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