In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 21, No. 3 ( 2003-05-01), p. 966-969
Abstract:
We present an approach for two-dimensional photonic crystal fabrication in prestructured multilayer membranes. We show that well-defined structures with submicronic periodicity can be created by focused-ion-beam etching through the membranes. A photonic band gap around 1.5 μm is observed by spectral measurements, in agreement with theoretical simulations. Further improvements are also proposed.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2003
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0
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