In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 7S ( 1999-07-01), p. 4309-
Abstract:
A large-diameter uniform plasma is obtained by microwave discharge
without the use of magnetic fields at pressures in the mTorr range. Microwave fields at 2.45 GHz are radiated from a multislotted
planar antenna located a short distance above the glass window of a discharge chamber.
Overdense plasmas are produced with ± 3–4% uniformity of ion saturation current over 30 cm diameter for wide ranges
of microwave power and gas pressure. The discharge can be started up at pressures as low as 0.5 mTorr.
The efficient production of overdense plasmas is investigated
by measuring microwave field propagation in the system.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.4309
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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