In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 7A ( 1997-07-01), p. L880-
Abstract:
Carbon atom densities in an inductively coupled radio frequency (13.56 MHz) CO and CO and H 2 mixed plasmas were successfully measured for the first time using ultra-violet absorption spectroscopy (UVAS) with a carbon hollow cathode lamp. This method, developed for monitoring carbon atoms in-situ in the plasmas, is very useful for the investigation of etching and chemical vapor deposition (CVD) processes containing carbon atoms and the sputtering system employing a carbon target.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.L880
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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