Online Resource
Institute of Electrical and Electronics Engineers (IEEE)
;
1994
In:
Journal of Microelectromechanical Systems Vol. 3, No. 2 ( 1994-6), p. 81-87
In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 3, No. 2 ( 1994-6), p. 81-87
Type of Medium:
Online Resource
ISSN:
1057-7157
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
1994
detail.hit.zdb_id:
2027726-X
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