In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 20, No. 6 ( 2002-11-01), p. 2853-2856
Abstract:
We describe a transfer printing technique for directly patterning thin gold films onto GaAs surfaces. This additive transfer process is mediated by the presence of an alkane dithiol monolayer on the wafer surface. The transferred patterns are chemically bound to the wafer surface and they exhibit strong adhesion (i.e., they easily pass Scotch tape adhesion tests.) A variety of gold patterns with a wide range of feature sizes can be printed onto GaAs (100), (110), (211)A, and (211)B using this approach.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2002
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0
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