In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 23, No. 8 ( 2015), p. 2143-2148
Type of Medium:
Online Resource
ISSN:
1004-924X
Uniform Title:
高数值孔径投影光刻物镜波像差的自动平衡优化
DOI:
10.3788/OPE./2015/23/8
DOI:
10.3788/OPE.20152308.2143
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2015
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