In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 25, No. 5R ( 1986-05-01), p. 764-
Abstract:
Although metal and oxygen impurities in nuclear fusion machines can be reduced by first-wall carbonization, this procedure contaminates the surfaces of observation windows and other parts. This paper describes the removal of carbon films from a quartz sample using a locally produced ECR hydrogen plasma as a method of overcoming this problem.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1986
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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