In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 8B ( 1999-08-01), p. L951-
Abstract:
The potential, ion density, electron density, and the rates of excitation, attachment, and ionization in the afterglow of radio-frequency chlorine discharge are examined using the particle-in-cell/Monte Carlo method. The gas pressure is 50 mTorr and the amplitude of rf voltage is 250 V before the power is turned off. The electron loss mechanism changes near time t =3 µs. For t 〈 3 µs, the loss is caused by the escape of fast electrons to the electrodes; for t 〉 3 µs, the loss is caused by dissociative attachment of slow electrons.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.L951
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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