In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 4R ( 1994-04-01), p. 1778-
Abstract:
Selectively multiple δ- doped GaAs/In 0.25 Ga 0.75 As/GaAs pseudomorphic heterostructures grown by low-pressure metalorganic chemical vapor deposition (LP-MOCVD) for improving two-dimensional electron gas (2DEG) concentrations and mobilities were demonstrated. All the multiple δ- doped structures revealed significantly higher 2DEG concentration and mobility than those of single δ- doped and conventional homogeneously doped GaAs/InGaAs structures. The structure with double δ- doped GaAs layers grown symmetrically on both sides of the channel showed extremely high 2DEG concentrations of 6.2(4.1)×10 12 cm -2 and mobilities of 4630(19100) cm 2 / v· s at 300(77) K. Meanwhile, a peak extrinsic transconductance of 390 mS/mm, maximum effective saturation current density of 880 mA/mm, with broad and high transconductance region at 300 K, were achieved in this symmetrically δ- doped GaAs structure.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.1778
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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