In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 40, No. 5S ( 2001-05-01), p. 3759-
Abstract:
This paper describes surface acoustic wave (SAW) propagation under a periodic metallic grating structure overlaid with an SiO 2 film. An analysis was made by modifying the software FEMSDA, in which the finite element method is applied to both the grating electrodes and SiO 2 overlay. For Rayleigh-type SAW propagating on 128°YX-LiNbO 3 , changes in the reflection coefficient and effective velocity are calculated as a function of the SiO 2 film thickness overlaying an Al grating structure. It is shown that the SiO 2 film overlaying the top surface of the grating electrodes affects both the SAW reflection coefficient and effective SAW velocity more significantly than the film overlaying the electrode gaps.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.40.3759
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2001
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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