In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 12S ( 1999-12-01), p. 7126-
Abstract:
Metastable chlorine ions (Cl +* ) were detected in time-modulated
inductively coupled plasma by a time-resolved laser-induced fluorescence technique.
By varying the rf power, gas pressure and modulation frequency, the Cl +* density was measured in detail.
In the discharge-on period, the Cl +* density increased
as the rf power increased. In the discharge-off period, the rf power decreased within 1 µs,
however, the Cl +* density decreased more slowly and persisted for a while.
The decay constant was evaluated to be around 10 µs by fitting the decay curve under our experimental conditions.
In addition, the diffusion coefficient of Cl +* was also estimated.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.7126
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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