In:
Applied Mechanics and Materials, Trans Tech Publications, Ltd., Vol. 479-480 ( 2013-12), p. 682-686
Abstract:
In this article, a small-displacement sensing system based on the surface plasmon resonance technology in heterodyne interferometry is proposed and evaluated. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a halfwave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.155nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.
Type of Medium:
Online Resource
ISSN:
1662-7482
DOI:
10.4028/www.scientific.net/AMM.479-480
DOI:
10.4028/www.scientific.net/AMM.479-480.682
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2013
detail.hit.zdb_id:
2251882-4
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