In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 7S ( 1999-07-01), p. 4504-
Abstract:
Diamond was successfully synthesized by using
H 2 -rich CH 4 /CO/H 2 and H 2 -rich CH 4 /H 2 inductively coupled plasmas at a pressure of 11 Pa.
The ratio of particle size to deposition time, as a criterion of the diamond growth rate, in
H 2 -rich CH 4 /CO/H 2 mixture gas plasmas was higher than that in
H 2 -rich CH 4 /H 2 mixture gas plasmas.
The deposits in H 2 -rich CH 4 /H 2 and
H 2 -rich CH 4 /CO/H 2 mixture gas plasmas were found to contain nondiamond phases,
as confirmed by Raman spectroscopy. In order to investigate the mechanism involved in diamond
formation, C-atom densities in the plasmas were measured by vacuum ultraviolet absorption spectroscopy
with a carbon hollow cathode lamp. In addition, CH, OH and H-atom
emission intensities were measured by optical emission spectroscopy.
As a result, it was found that the C-atom densities increased considerably with
increasing mixture ratio of CO to CH 4 .
On the basis of the correlation between the quality of deposits and the C-atom densities,
C-atoms were determined to probably contribute to the formation of nondiamond phases in the deposits.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.4504
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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