In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 9R ( 2000-09-01), p. 5090-
Abstract:
Niobium-based superconducting tunnel junctions (STJs) with aluminum trapping layers as X-ray detectors were fabricated. We applied a fabrication technique for reducing the leakage current and improving the energy resolution for X-rays at around 6 keV. The edges of two Al layers sandwiching a tunneling barrier were oxidized by plasma discharge. The performance of these new STJs was compared with other types of STJs to which thermal oxidization in an O 2 atmosphere had been applied. The oxidization process in O 2 plasma significantly improved the energy resolution for X-rays, which reached values (FWHM) of 41 eV, 58 eV, 65 eV, and 129 eV for STJs with the size of 20×20 µm 2 , 100×100 µm 2 , 200×200 µm 2 , and 500×500 µm 2 , respectively.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.5090
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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