In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 5S ( 1999-05-01), p. 3288-
Abstract:
A leaky surface acoustic wave (LSAW) and a leaky pseudo SAW (LPSAW) of
various rotated Y-cut langasite substrates grown by the Czochralski method were measured by an ultrasonic microscope. The measured results agreed well
with the values calculated using Ilyaeve's material constants of five kinds of material. Rayleigh SAW transversal filters, having various aluminum (Al)
thicknesses of interdigital transducers (IDT), were constituted on (0°, 140–150°, 24–25°) and
(12°, 150–153°, 36–37°) plates. A temperature coefficient of frequency (TCF) of the Rayleigh SAW filters
was measured by measuring their center frequency. It was clarified that (0°, 142°, 24.5°)
and (0°, 143°, 24°) plates at normalized Al-IDT thickness (H A l /λ) 0.0125, and
(12°, 153°, 37°) plates at H A l /λ = 0.0625 showed turnover temperatures of
25°C, 30°C and 28°C and excellent TCFs (ΔF/F/°C = 1.83, 1.63,
and 1.95 ppm/°C). Measured results of electromechanical coupling factor on their substrates
showed similar values ( k s 2 = 0.41, 0.42 and 0.46%) to
the theoretical ones. The (12°, 153°, 37°) plate having the
largest coupling factor is the most suitable one for SAW devices. Furthermore, the velocity, the coupling factor,
and the propagation loss of LSAW on air/various Y-X langasite plates (0°, θ, 0°) were also calculated.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.3288
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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