In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 23, No. 4 ( 2005-07-01), p. 605-608
Abstract:
We have studied the effect of Au addition on Ni-mediated crystallization of amorphous silicon(a-Si) using a silicon–nitride (SiNx) cap layer. The Ni and Au particles were sputtered on the SiNx∕a-Si and then the samples were heated for crystallization at a temperature of 550 °C. We achieved disk-shaped grains and found that the grain size increased with increasing Au density when the Ni density was fixed at 2.45×1014∕cm2. We achieved a grain size of ∼45μm, however the a-Si could not be crystallized when Au density is higher than Ni density.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2005
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
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