In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 3B ( 1999-03-01), p. L342-
Abstract:
The measurement principle for line-focus-beam acoustic microscopy is
extended to apply to thin specimens taking into consideration back-reflection effects. The theoretical expressions and interpretation are
given for the apparent and periodic changes in leaky surface acoustic wave (LSAW) velocity and attenuation with a constant frequency interval Δ F 1 in the frequency dependence at a chosen measurement position.
The validity of taking moving average with a moving period ±Δ F 1 /2 to obtain true measurement values is proven, and followed by
experiments for a Y -cut, X -propagating MgO:LiNbO 3 wafer
specimen with 505 .6-µm thickness.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.L342
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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