In:
ChemPhysChem, Wiley, Vol. 18, No. 15 ( 2017-08-05), p. 1966-1970
Abstract:
We report on the growth of polycrystalline BiFeO 3 thin films on SiO 2 /Si(001) and Pt(111) substrates by atomic layer deposition using the precursors ferrocene, triphenyl‐bismuth, and ozone. By growing alternating layers of Fe 2 O 3 and Bi 2 O 3 , we employ a superlattice approach and demonstrate an efficient control of the cation stoichiometry. The superlattice decay and the resulting formation of polycrystalline BiFeO 3 films are studied by in situ X‐ray diffraction, in situ X‐ray photoelectron spectroscopy, and transmission electron microscopy. No intermediate ternary phases are formed and BiFeO 3 crystallization is initiated in the Bi 2 O 3 layers at 450 °C following the diffusion‐driven intermixing of the cations. Our study of the BiFeO 3 formation provides an insight into the complex interplay between microstructural evolution, grain growth, and bismuth oxide evaporation, with implications for optimization of ferroelectric properties.
Type of Medium:
Online Resource
ISSN:
1439-4235
,
1439-7641
DOI:
10.1002/cphc.201700407
Language:
English
Publisher:
Wiley
Publication Date:
2017
detail.hit.zdb_id:
2025223-7
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