In:
Applied Physics Letters, AIP Publishing, Vol. 77, No. 16 ( 2000-10-16), p. 2470-2472
Abstract:
We have measured uncapped mesoporous low-dielectric-constant films using positron annihilation lifetime spectroscopy (PALS), a nondestructive technique, which yields both pore-size distributions and the threshold for pore interconnectivity. Pairs of fully cured capped and uncapped identical films, initially containing 5%–50% porogen additions, exhibited similar signatures in PALS, establishing a technique in which film capping is unnecessary. We also found that it was possible to distinguish between closed and percolated pores, without film capping, by comparing lifetime spectra of a film taken using different detector configurations. Interconnected pores were observed in cured samples, which had greater than 20% porogen additions.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
2000
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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