In:
Chinese Journal of Liquid Crystals and Displays, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 27, No. 2 ( 2012), p. 204-207
Type of Medium:
Online Resource
ISSN:
1007-2780
Uniform Title:
增强型等离子体耦合干法刻蚀条件对PR胶灰化的影响
DOI:
10.3788/YJYXS/2012/27/2
DOI:
10.3788/YJYXS20122702.0204
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2012
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