In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 7B ( 1994-07-01), p. L1019-
Abstract:
To explain the anomalous phenomena which have been observed in rapid heating processes, a structural model of a-Si and a model for its transient phases have been proposed. In the structural model, a-Si was assumed to be composed of many small regions with different free-energy levels. It was thought that a-Si transformed to a new phase in which both liquid Si and solid a-Si clusters coexisted when the a-Si was rapidly heated so as to avoid crystallisation. From the enhanced diffusion data previously reported for rapid thermal annealing processes, the viscosity of the partially molten a-Si at around 1000°C was estimated to be 10 7 –10 8 mPa·s based on our model.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.L1019
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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