In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 30, No. 6A ( 1991-06-01), p. L1063-
Abstract:
Using a movable magnetic filter, a technique to control plasma parameters spatially has been investigated in a multicusp plasma source. At any filter position, plasma parameters change steeply across the magnetic filter. Mainly, a multicusp plasma source is divided into two parts, i.e., a source plasma region with energetic electrons and a diffused plasma region. In the latter region, the high-energy component of electrons is eliminated thoroughly by the localized magnetic field of the filter.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.30.L1063
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1991
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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