In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 31, No. 7R ( 1992-07-01), p. 2243-
Abstract:
A new technique to produce a strongly ionized plasma from aluminum metal is achieved by use of the plasma-assisted arc in a tokamak discharge with low temperature (\lesssim10 eV), high electron density (\gtrsim10 12 cm -3 ), and low gas pressure (10 -5 ∼10 -4 Torr). On arcing, the spectral lines of AlI, AlII and AlIII have been observed. Using the comparison spectroscopic method with no need of absolute measurement of spectral line intensity, we obtained the result that doubly ionized aluminum ions are dominant, and the density is estimated to be about 10 11 cm -3 . The aluminum plasma thus produced is useful and has potential for plasma processing, such as thin-film formation of AlN.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.31.2243
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1992
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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