Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Online Resource
    Online Resource
    The Electrochemical Society ; 2017
    In:  ECS Transactions Vol. 75, No. 20 ( 2017-01-06), p. 61-69
    In: ECS Transactions, The Electrochemical Society, Vol. 75, No. 20 ( 2017-01-06), p. 61-69
    Type of Medium: Online Resource
    ISSN: 1938-6737 , 1938-5862
    Language: English
    Publisher: The Electrochemical Society
    Publication Date: 2017
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 2
    Online Resource
    Online Resource
    The Electrochemical Society ; 2016
    In:  ECS Meeting Abstracts Vol. MA2016-02, No. 3 ( 2016-09-01), p. 347-347
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2016-02, No. 3 ( 2016-09-01), p. 347-347
    Abstract: Present-day planar thin-film solid state Li-ion batteries provide an excellent power density and improved safety over their liquid counterparts. However, their energy density remains typically low. For this reason the transition to a 3D thin film battery is presently being explored. This preserves the extreme power characteristics associated with the usage of thin films while increasing the amount of active material and therefore the energy density. Key to the realization of such battery is the possibility to coat these large surface area structures in a conformal and defect free way 1 . This aspect is especially critical for the solid electrolyte which provides electronic insulation between the two electrodes. Nitrogen-doped lithium phosphate glass or LiPON, is the solid state electrolytes of choice for planar thin-film batteries. This is attributed to its good electronic insulating properties, its wide electrochemical window (0 - 5.5V vs Li + /Li) and reasonable ionic conductivity (~10 -6 S/cm). The ionic resistance of the LiPON is still below 100 Ω.cm 2 when the film thickness is kept below 1 μm. It was shown recently that LiPON layers can provide electronic insulation down to 15 nm. 2 Atomic layer deposition (ALD), which is a vapor based technique with sequential and self-limiting reactions, is known to provide excellent conformality and thickness control (down to sub-nm level). Hence, it is ideally suited for the deposition of the solid electrolyte in thin film battery applications. Recently both thermal and plasma assisted ALD of LiPON was shown 3,4 . In this work we report the deposition of Li 3 PO 4 and Li x PO y N z using LiO t Bu and TMPO as precursors and H 2 O (or O 2 plasma) and N 2 plasma as reactants. The effect of these different processing conditions on the stoichiometry is studied by a combination of Elastic Recoil Detection (ERD) and X-ray Photoelectron Spectroscopy (XPS). As expected, nitrogen is incorporated in the Li 3 PO 4 layers by sequentially exposing the layers to a N 2 plasma. For the first time the electrical and electrochemical properties were investigated for a range of different material compositions and thicknesses in detail. Large varieties in ionic conducitivity (between 10 -14 – 10 -7 S/cm) and activation energy were measured by impedance spectroscopy for the different processing conditions. DC-polarization measurements showed good electronic insulating properties for films below 50 nm (ρ ~ 10 15 Ω.cm). Such thin films lead to a minimal ionic resistance (on the order of 1.5 Ω.cm 2 for the thinnest layer), which can facilitate extreme charging and discharging kinetics. Finally, the deposition of these layers was tested in high aspect ratio pillar arrays and in Li-ion half cells comprising TiO 2 /LiPO(N) and LiMn 2 O 4 /LiPO(N). The layers fabricated here can serve as electrolyte in the all solid state 3D batteries. However, they also hold potential as buffer layer to stabilize electrodes in a classical wet battery. Vereecken et al., ECS transactions , 58, 111-118, 2013 Put et al., ACS Applied materials & interfaces , 8 , 7060–7069, 2016 Kozen et al., Chemistry of materials , 27 , 5324-5331, 2015 Nisula et al., Chemistry of materials , 27 , 6987–6993, 2015 Figure Caption: Figure 1: Complex plane plot of a Li 3 PO 4 layer showing the characteristic semi-circle associated with Li-ion conductivity through the layer. The inset shows the conformal coating of a high aspect-ratio pillar array. Figure 1
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
    detail.hit.zdb_id: 2438749-6
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 3
    Online Resource
    Online Resource
    The Electrochemical Society ; 2016
    In:  ECS Meeting Abstracts Vol. MA2016-02, No. 28 ( 2016-09-01), p. 1861-1861
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2016-02, No. 28 ( 2016-09-01), p. 1861-1861
    Abstract: All-solid-state Li-ion batteries offer the advantage of a higher power density, a wider temperature window and an improved safety with respect to batteries containing liquid electrolytes. However, the lack of solid electrolytes with sufficient ion conductivity and wide electrochemical window is currently inhibiting the implementation of solid state batteries. Although the limited ionic conductivity can be overcome by employing very thin solid-state electrolyte films which shorten the ionic diffusion distance, the capacity will still be insufficient. This makes the use of non-planar devices of particular high interest as the application of 3D-(nano)structured materials will increase the total effective battery area. Moreover, the area enhancement will result in an ever higher energy density, faster (dis)charging, better stability, etc. Conventional deposition techniques, such as PVD and PE-CVD, do not generally result in conformal thin layers on 3D structures. Therefore, novel deposition techniques leading to enhanced control in thin film properties and conformality are being introduced in the field of battery research. Atomic layer deposition (ALD), which is based on sequential and self-limiting reactions, has emerged as a powerful tool since it offers exceptional conformality on high-aspect ratio structures, thickness control at sub-nm level, and tunable film properties. In this work, thin film lithium carbonate (Li₂CO₃) is being deposited by ALD. Li₂CO₃ is widely used as a building block for the fabrication of Li-ion battery active materials, such as lithium cobalt oxide (LiCoO₂), which is used for most lithium-ion battery cathodes [1]. It has also been reported that Li₂CO₃, without combining it with other materials, has a pure ion conductive behavior and a good electrochemical stability [2] . The high electrochemical stability of Li₂CO₃ makes it useful as an artificial solid-electrolyte interface (SEI) or buffer layer [3]. The SEI and buffer layer need to be conformal and very thin, for which the use of ALD would be beneficial. In addition, ultra-thin Li₂CO₃ can also improve the stability of known solid electrolyte layers, such as lithium lanthanum titanate or lithium phosphate. More specifically, we focus on the optimization of the plasma-assisted Li₂CO₃ ALD process by (in situ) growth studies and we investigate the influence of the process parameters on the electrical and electrochemical properties. Using plasmas in combination with ALD opens up the possibility to tune the properties of the layer by varying the plasma exposure time and also to deposit at lower temperatures. Although the plasma-assisted ALD process for Li₂CO₃ has been reported in literature before [4], to our knowledge, the optimization of the process was not reported, and also an electrochemical analysis of Li₂CO₃ layers fabricated with this method is still lacking. The ALD process employed, consists of a combination of LiO t Bu as lithium precursor and an O₂ plasma as oxidant source, alternated by Ar purges. A growth rate of ± 0.8 Å/cycle was obtained at a process table temperature of 150 °C on TiN substrates in the linear growth regime (figure). TiN substrates are used as an electrical contact for electrical and electrochemical testing of the layers. The film stoichiometry was investigated with Elastic Recoil Detection (ERD) and X-ray Photoelectron Spectroscopy (XPS). The results are in good agreement with the stoichiometry and density of Li₂CO₃. Excellent electronic insulation properties were confirmed by current-voltage and DC-polarization measurements. This observation is in agreement with impedance measurements at open circuit potential (figure), which showed no apparent electronic conductivity of the film. The dependence of ALD process parameters such as temperature and O₂ plasma exposure time on the electrochemical properties is investigated. Moreover, half cells employing Li₂CO₃ with TiO₂, LiMn₂O₄ and Si electrodes were studied for cyclability and rate performance. These and other results will be presented in this contribution. Acknowledgements: This project is financially supported by the Dutch program “A green Deal in Energy Materials” ADEM Innovation Lab. M. E. Donders et al., Journal of The Electrochemical Society , 160 (5), 2013 J. Mizusaki et al., Solid State Ionics , 53-56 , 1992 P. Verma et al., Electrochimica Acta , 55 , 2010 A. C. Kozen et al., The Journal of Physical Chemistry C , 118 , 2014 Figure caption: On the left: growth curve for the plasma-assited ALD process of Li₂CO₃ measured by in-situ spectroscopic ellipsometry on TiN at 150 °C and the corresponding process steps (insert). On the right: Electrochemical impedance spectroscopy measured at room temperature showing the presence of ionic conductivity. Figure 1
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
    detail.hit.zdb_id: 2438749-6
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 4
    Online Resource
    Online Resource
    The Electrochemical Society ; 2015
    In:  ECS Meeting Abstracts Vol. MA2015-03, No. 2 ( 2015-07-15), p. 476-476
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2015-03, No. 2 ( 2015-07-15), p. 476-476
    Abstract: The use of nanostructured materials can make a significant contribution to the development of solid-state batteries [1-3] . We here focus on a class of nanostructured materials called metal-organic frameworks (MOFs), which exhibits promising properties that potentially meet the requirements of a solid-state Li-ion electrolyte in terms of high ionic conductivity ( 〉 10 -4 S/cm) and low electronic leakage. MOFs are hybrid nanoporous solids that result from a reaction of organic ligands and metallic cations to create a three-dimensional controlled skeleton. Fig. 1 illustrates the crystal structure of the so called MIL-121 MOF [4]. The 1D pores of this structure by which the transport of ions is carried out have promising dimensions. Indeed, the large nano-crystalline pores of the MOFs are expected to lead to a high ionic conductivity, as the mobile ions are not sterically hindered inside the pores. The diffusion mechanism in a functionalized MOF is expected to occur in a similar way to the one of an adatom on top of a surface. A general used approach to create a Li + ion conductive MOF focusses on the inclusion of a lithium salt in the MOF pores. Yanai et al. [5] reported that the incorporation of a complex of polyethylene glycol with LiBF 4 into the nanochannels of a Zn-MOF leads to a liquid-like mobility of the Li-ions (activation energy of diffusion equals 0 . 18 eV). Wiers et al. demonstrates the uptake of lithium isopropoxide (LiOiPr) salt in a Mg-MOF. The salt is electrostatically bound to the open metal centers of this Mg-MOF. An ionic conductivity of 3 . 1x10 -4 S/cm is reported. By a similar approach Ameloot et al. [6] introduced a lithium salt in a Zr-MOF. Here, the lithium salt is chemically bound to the organic ligands of the MOF. Fig. 1 shows the crystal structure of the MIL-121 which we investigated with first-principles techniques based on density functional theory (DFT). The carboxyl-groups in this structure rotate themselves such that their acidic framework protons (labeled A in Fig. 1) interact with two carboxyl-groups. Consequently, an open-pore structure is obtained. To include lithium in the pores of the MIL-121 the acidic framework protons labeled A in Fig. 1 are substituted by Li + ions. This idea is similar to the one proposed by Himsl et al. [7]. Only here, the lithium-proton exchange reaction occurs on a carboxyl-group rather than on a hydroxyl one. The higher acidity of the carboxyl-groups with respect to the hydroxyl ones potentially results in a higher lithium concentration. Furthermore, the weak bond between the –COO - anion and the Li + cation, and the rotational freedom of the carboxyl-group are expected to further improve the ionic conductivity. We will present the modeling methodology that enables us to simulate Li + ion conductivity in the MOF pores, followed by a discussion on the obtained results. The results cover the evolution of the structural parameters and the electronic structure of the MIL-121 unit cell for different lithium concentrations. Furthermore, the binding energies of the different acidic framework protons A, B, and C (see Fig. 1) are compared to each other. Finally, the dynamics of the atoms in the unit cell of the MIL-121 is studied for the highest possible lithium concentration in which all acidic framework protons A are substituted by a Li + ion. The results of this study give us atomistic insight on the behavior of the Li-ions in MOF pores. These results lead to useful suggestion to further develop MOF as solid-state Li +  ion electrolytes.  [1] Liu, C., Li, F., Ma, L.-P., and Cheng, H.-M. (2010) Advanced Materials , 22 , E28 – E62. [2] Patil, A., Patil, V., Shin, D. W., Choi, J.-W., Paik, D.-S., and Yoon, S.-J. (2008) Materials Research Bulletin , 43 , 1913–1942. [3] Wang, Y. and Cao, G. (2008) Advanced Materials , 20 , 2251–2269. [4] Volkringer, C., Loiseau, T., Guillou, N., Férey, G., Haouas, M., Taulelle, F., Elkaim, E., and Stock, N. (2010) Inorganic chemistry , 49 , 9852. [5] Yanai, N., Uemura, T., Horike, S., Shimomura, S., and Kitagawa, S. (2011) Chemical Communications (Cambridge, United Kingdom) , 47 , 1722. [6] Ameloot, R., Aubrey, M., Wiers, B. M., Gómora-figueroa, A. P., Patel, S. N., Balsara, N. P., and Long, J. R. (2013) Chemistry - A European Journal , 19 , 5533. [7] Himsl, D., Wallacher, D., and Hartmann, M. (2009) Angewandte Chemie (International ed. In English) , 48 , 4639 Figure 1
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2015
    detail.hit.zdb_id: 2438749-6
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 5
    Online Resource
    Online Resource
    The Electrochemical Society ; 2013
    In:  Journal of The Electrochemical Society Vol. 160, No. 4 ( 2013), p. D196-D201
    In: Journal of The Electrochemical Society, The Electrochemical Society, Vol. 160, No. 4 ( 2013), p. D196-D201
    Type of Medium: Online Resource
    ISSN: 0013-4651 , 1945-7111
    RVK:
    Language: English
    Publisher: The Electrochemical Society
    Publication Date: 2013
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 6
    Online Resource
    Online Resource
    The Electrochemical Society ; 2013
    In:  Journal of The Electrochemical Society Vol. 160, No. 2 ( 2013), p. D75-D79
    In: Journal of The Electrochemical Society, The Electrochemical Society, Vol. 160, No. 2 ( 2013), p. D75-D79
    Type of Medium: Online Resource
    ISSN: 0013-4651 , 1945-7111
    RVK:
    Language: English
    Publisher: The Electrochemical Society
    Publication Date: 2013
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 7
    Online Resource
    Online Resource
    The Electrochemical Society ; 2010
    In:  ECS Meeting Abstracts Vol. MA2010-02, No. 31 ( 2010-07-08), p. 1985-1985
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2010-02, No. 31 ( 2010-07-08), p. 1985-1985
    Abstract: Abstract not Available.
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2010
    detail.hit.zdb_id: 2438749-6
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 8
    Online Resource
    Online Resource
    The Electrochemical Society ; 2018
    In:  ECS Meeting Abstracts Vol. MA2018-01, No. 19 ( 2018-04-13), p. 1251-1251
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2018-01, No. 19 ( 2018-04-13), p. 1251-1251
    Abstract: Electrodeposition is a prevailing method in fabrication of Cu interconnects in microelectronics due to its ability to fill complex structures having a wide range of critical dimensions. A typical acidified Cu electrolyte contains a number of additives, organic and inorganic species in ppm amounts, with a specific role in the plating process. The additives in Cu plating have been extensively studied in the past couple of decades, and grouped according to their role in filling/creating features for microelectronics applications. This categorization is not a uniform one, and it might differ from author to author. In one popular convention, organic additives in the so-called three-component plating bath are named accelerator, suppressor and leveler, with their names hinting at how they influence Cu deposition. Ultimately, it is thanks to these additives that defect-free Cu features ranging from tens of nanometers to hundreds of micrometers can be economically fabricated. However, it is not enough to successfully fill a given single feature. The same has to be done for all the features on a 300 mm wafer, and then performed reproducibly over and over again. So, one needs to monitor the state of the electrolyte, i.e. of all the bath constituents, and either replace or replenish the electrolyte when the need arises. Additives could also have a strong influence on the physical properties of the deposit and therefore have a strong influence on the post-plating processing results. An additive that promotes void-free deposition of Cu structures in the end might not be used in a production line if it creates issues in the processing steps following electrodeposition. In our presentation we focus on a number of specific examples showing the effect of additives on nucleation and growth of Cu, propagation of Cu fronts on resistive substrates, post-plating processing, and their use in substrate surface modifications. A closer look is taken into in situ microscopic and electrochemical techniques and their use in studies of electrochemical nucleation and growth of Cu. We discuss advantages and drawbacks of potential step and galvanostatic deposition techniques in determining nucleation and growth parameters, and selection criteria for additive sets for a given plating task. We demonstrate that substrate surface modifications prior to plating could help simplify bath composition, i.e. eliminate need for some additives in the electrolyte, or improve the filling performance of the given plating bath. We also give examples of additives that promoted void-free filling of features but also influenced physical/mechanical properties of the final product in such a way that rendered it unusable in a specific application.
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2018
    detail.hit.zdb_id: 2438749-6
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 9
    Online Resource
    Online Resource
    The Electrochemical Society ; 2011
    In:  ECS Transactions Vol. 33, No. 18 ( 2011-03-21), p. 75-80
    In: ECS Transactions, The Electrochemical Society, Vol. 33, No. 18 ( 2011-03-21), p. 75-80
    Abstract: Dimethyl sulfoxide (DMSO) electrolytes were investigated for the electrodeposition of bismuth telluride films for thermoelectric applications. The investigation revealed the influences of electrolyte ion concentration, deposition potential, and temperature on the alloy composition. Full composition range of bismuth telluride BixTey materials could be prepared by varying either electrolyte ion concentration or deposition potential. The film morphology was found smooth at the stoichiometric composition and affected by the film composition, rather than deposition conditions. The highest Seebeck coefficient observed for n-type films was -134 uV/K (unannealed) and +150 uV/K for p-type (annealed).
    Type of Medium: Online Resource
    ISSN: 1938-5862 , 1938-6737
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2011
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 10
    In: MRS Proceedings, Springer Science and Business Media LLC, Vol. 1079 ( 2008)
    Abstract: The integration of high-density CNT bundles as via interconnects in a CNT/Cu-hybrid BEOL stack is evaluated. CNT via-conduits may greatly improve heat dissipation and as such lower interconnect resistance and improve electromigration resistance. Each carbon shell of the nanotube contributes to electrical and thermal conduction and densities as high as 5×10 13 shells per cm 2 are estimated necessary. CNT growth processes on BEOL compatible metals are presented with tube densities up to 10 12 cm −2 and shell densities approaching 10 13 cm −2 on blanket substrates. Selective growth of CNT bundles with carbon shell densities around 10 12 cm −2 is demonstrated with high yield. Ohmic behavior of TiN/CNT/Ti contacts is shown with a CNT via resistivity of 1.2 mΩ cm.
    Type of Medium: Online Resource
    ISSN: 0272-9172 , 1946-4274
    Language: English
    Publisher: Springer Science and Business Media LLC
    Publication Date: 2008
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. Further information can be found on the KOBV privacy pages