In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 5R ( 1997-05-01), p. 2792-
Abstract:
Nonideal Czochralski (CZ) silicon crystals were characterized systematically by double-crystal and triple-crystal diffractometry in the Bragg case for high energy synchrotron radiation. The crystals were either annealed at 780°C, 1000°C, and 1170°C, or lapped, with a mean abrasive particle sizes of 13 µm, 25 µm, and 42 µm. Triple-crystal diffractometry was performed at 60 keV of the BL14 vertical wiggler of the Photon Factory and double-crystal diffractometry by use of a Mo rotating-anode X-ray generator. Physical properties of the annealed and lapped crystals were studied quantitatively with respect to mosaic spread and lattice parameter fluctuation.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.2792
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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