In:
Materials Science Forum, Trans Tech Publications, Ltd., Vol. 778-780 ( 2014-2), p. 354-357
Abstract:
A kind of broken carrot defects which are not parallel to the step flow direction are observed on 4H-SiC epilayer surfaces. We use the molten KOH and polishing methods to reveal the structure and source of the broken carrots. It is shown that the broken carrot defects still contain the prismatic stacking fault (SF) and basal plane SF and originate from threading screw dislocation on the substrate. The presence of other substrate threading dislocation can disturb the expansion of prismatic SF. This leads to the appearance of the broken carrot.
Type of Medium:
Online Resource
ISSN:
1662-9752
DOI:
10.4028/www.scientific.net/MSF.778-780
DOI:
10.4028/www.scientific.net/MSF.778-780.354
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2014
detail.hit.zdb_id:
2047372-2
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