In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 2A ( 1996-02-01), p. L186-
Abstract:
Synchrotron radiation (SR) direct micromachining of polymers was developed and high-aspect-ratio microparts of polytetrafluoroethylene (PTFE) were made. The limitation of critical dependence on the photon flux was eliminated by processing PTFE at a temperature of 200–250°C, so that the process was greatly simplified and the aspect-ratios were improved with reducing the smallest surface detail to less than ten microns and achieving the largest structural height of one thousand microns. The decomposition mechanism was discussed with a comparison between the SR micromachining and laser ablation.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.L186
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1996
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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