In:
Key Engineering Materials, Trans Tech Publications, Ltd., Vol. 871 ( 2021-1), p. 243-247
Abstract:
The ProENGINEER software is used to build a geometric model for the whole process cavity and internal structure and conduct the internal dynamic simulation of cavity with different diffusion temperatures of 1,000°C, 1,050°C, 1,100°C and 1,150°C, and different diffusion time of 5 min, 10 min, 15 min and 20 min. Analyze the process control indexes by combining with specific thermal diffusion test, and study the relationship between hydrodynamic parameters and diffusion uniformity, Comprehensively investigate the effects of the diffusion temperature and diffusion time on doping, achieving the requirements of impurity distribution in materials.
Type of Medium:
Online Resource
ISSN:
1662-9795
DOI:
10.4028/www.scientific.net/KEM.871
DOI:
10.4028/www.scientific.net/KEM.871.243
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2021
detail.hit.zdb_id:
2073306-9
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