Format:
1 Online-Ressource ([vi], 330 pages)
,
illustrations
ISBN:
0780376730
,
9780780376731
Note:
"Advancing the science of semiconductor manufacturing excellence"--Page [i]
,
"IEEE Catalog Number: 03CH37406"--Page ii
,
Cover title
,
Includes bibliographical references
Additional Edition:
Print version IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (14th : 2003 : Munich, Germany) ASMC 2003 Piscataway, N.J : IEEE ; San Jose, Calif. : SEMI, ©2003
Language:
English
Keywords:
Konferenzschrift
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