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  • 1
    Online Resource
    Online Resource
    Bellingham :Society of Photo-optical Instrumentation Engineers,
    UID:
    almafu_9958898543402883
    Format: 1 online resource (123 pages)
    ISBN: 1-5106-1914-3
    Series Statement: SPIE Press monograph ; PM286
    Content: Many scientists and engineers consider themselves poor writers or find the writing process difficult. The good news is that you do not have to be a talented writer to produce a good scientific paper, but you do have to be a careful writer. In particular, writing for a peer-reviewed scientific or engineering journal requires learning and executing a specific formula for presenting scientific work. This book is all about teaching the style and conventions of writing for a peer-reviewed scientific journal. From structure to style, titles to tables, abstracts to author lists, this book gives practical advice about the process of writing a paper and getting it published.
    Note: Many scientists and engineers consider themselves poor writers or find the writing process difficult. The good news is that you do not have to be a talented writer to produce a good scientific paper, but you do have to be a careful writer. In particular, writing for a peer-reviewed scientific or engineering journal requires learning and executing a specific formula for presenting scientific work. This book is all about teaching the style and conventions of writing for a peer-reviewed scientific journal. From structure to style, titles to tables, abstracts to author lists, this book gives practical advice about the process of writing a paper and getting it published. , Preface -- Chapter 1. Getting started -- Chapter 2. Structure and organization -- Chapter 3. Language and style -- Chapter 4. Figures and tables -- Chapter 5. Citations -- Chapter 6. Abstract and title -- Chapter 7. What an editor looks for -- Chapter 8. Picking the right journal -- Chapter 9. Cover letter -- Chapter 10. The editorial review process -- Chapter 11. Review articles -- Chapter 12. The ethics of scientific publication -- Chapter 13. Authorship -- Chapter 14. Plagiarism -- Chapter 15. Double publication -- Chapter 16. Editorial ethics -- Appendix: A checklist for editors, reviewers, and authors. , Also available in print version.
    Additional Edition: ISBN 1-5106-1913-5
    Language: English
    Library Location Call Number Volume/Issue/Year Availability
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  • 2
    Online Resource
    Online Resource
    Hoboken, N.J. :Wiley ;
    UID:
    almafu_9959328070202883
    Format: 1 online resource
    ISBN: 9780470723876 , 0470723874 , 1282348817 , 9781282348813
    Content: Annotation
    Additional Edition: Print version: Mack, Chris A. Fundamental principles of optical lithography. Hoboken, N.J. : Wiley ; Chichester : John Wiley [distributor], 2007 ISBN 9780470727300
    Additional Edition: ISBN 0470727306
    Language: English
    Keywords: Electronic books. ; Electronic books. ; Electronic books.
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  • 3
    Online Resource
    Online Resource
    Bellingham :Society of Photo-optical Instrumentation Engineers,
    UID:
    almahu_9949890509602882
    Format: 1 online resource (123 pages)
    Edition: 1st ed.
    ISBN: 9781510619142
    Series Statement: Press Monograph ; v.286
    Content: Many scientists and engineers consider themselves poor writers or find the writing process difficult. The good news is that you do not have to be a talented writer to produce a good scientific paper, but you do have to be a careful writer. In particular, writing for a peer-reviewed scientific or engineering journal requires learning and executing a specific formula for presenting scientific work. This book is all about teaching the style and conventions of writing for a peer-reviewed scientific journal. From structure to style, titles to tables, abstracts to author lists, this book gives practical advice about the process of writing a paper and getting it published.
    Note: Intro -- Copyright -- Preface -- Chapter 1 Getting Started -- 1.1 Why Write and Publish a Paper? -- 1.2 The Literature Search -- 1.3 Plan and Execute Research with Publication in Mind -- 1.4 Conclusions -- References -- Chapter 2 Structure and Organization -- 2.1 The Standard Structure of a Scientific Paper -- 2.2 Introduction -- 2.3 Method -- 2.4 Results and Discussion -- 2.5 Conclusions -- 2.6 The Structures of Papers in the Journal of Micro/Nanolithography, MEMS, and MOEMS -- 2.7 Conclusions -- References -- Chapter 3 Language and Style -- 3.1 Some Books on Style -- 3.2 The Scientific Style -- 3.2.1 Truth -- 3.2.2 Presentation -- 3.2.3 Scene -- 3.2.4 Cast -- 3.2.5 Thought and language -- 3.3 Writing in the Scientific Style -- 3.4 Acronyms -- 3.5 Conclusions -- References -- Chapter 4 Figures and Tables -- 4.1 The Goals of Using Figures -- 4.2 Errors in Graphs -- 4.3 Graphical Integrity -- 4.4 A Few Guidelines -- 4.5 The x-y Scatterplot -- 4.5.1 The x-y scatterplot in Excel -- 4.5.2 Other scatterplot examples -- 4.6 Figure Quality from a Production Standpoint -- 4.7 Tables -- 4.8 Example: Figures and Tables in JM3 -- 4.9 Conclusions -- References -- Chapter 5 Citations -- 5.1 The Five Goals of Citations -- 5.2 The Literature Search -- 5.3 Verify, Verify, Verify -- 5.4 Other Problems with Citations -- 5.5 More on Self-Citations -- 5.6 Conclusions -- References -- Chapter 6 Abstract and Title -- 6.1 Writing an Abstract -- 6.2 Structured Abstracts -- 6.3 Important Additional Thoughts on Abstracts -- 6.4 Titles -- 6.5 Keywords -- 6.6 Conclusions -- References -- Chapter 7 What an Editor Looks For -- 7.1 Scope -- 7.2 Quality -- 7.3 Novelty -- 7.4 Significance -- 7.4.1 Measuring significance -- 7.4.2 In praise of the null result -- 7.5 Conclusions -- References -- Chapter 8 Picking the Right Journal -- 8.1 The Specialization Spectrum. , 8.2 Reading in the Age of Search Engines -- 8.3 Avoiding the Wrong Journal -- 8.4 Conclusions -- References -- Chapter 9 Cover Letter -- 9.1 The Purpose of the Cover Letter -- 9.2 A Structured Cover Letter -- 9.3 Conclusions -- Chapter 10 The Editorial Review Process -- 10.1 The Goals of Peer Review -- 10.2 Characteristics of a Well-Done Review -- 10.3 The Peer-Review Process at JM3 -- 10.4 Responsibilities -- 10.5 Criticisms of the Peer-Review Process -- 10.6 Conclusions -- References -- Chapter 11 Review Articles -- 11.1 What is a Review Article? -- 11.2 The Structure of a Review Article -- 11.3 What Makes a Review Article "Good"? -- 11.4 Conclusions -- References -- Chapter 12 The Ethics of Scientific Publication -- 12.1 The Primary Ethic of Scientific Publication -- 12.2 Author Responsibilities before Publication -- 12.3 Author Responsibilities during the Peer-Review Process -- 12.4 Author Responsibilities after Publication -- 12.5 Conclusions -- References -- Chapter 13 Authorship -- 13.1 Defining Authorship -- 13.2 No Guests or Ghosts -- 13.3 Do Not Forget the Acknowledgments -- 13.4 Author Order -- 13.5 Authorship within JM3 -- 13.6 Conclusions -- References -- Chapter 14 Plagiarism -- 14.1 Copying Another's Ideas -- 14.2 Copying Another's Images -- 14.3 Copying Another's Words -- 14.4 Duplicate Publication, or Self-Plagiarism -- 14.5 Cultural Issues -- 14.6 Conclusions -- References -- Chapter 15 Double Publication -- 15.1 Something Old, Something New -- 15.2 The Role of Conference Proceedings -- 15.3 Conclusions -- Chapter 16 Editorial Ethics -- 16.1 Editors' Responsibilities -- 16.2 Conclusions -- References -- Appendix: A Checklist for Editors, Reviewers, and Authors -- Author Biography.
    Additional Edition: Print version: Mack, Chris A. How to Write a Good Scientific Paper Bellingham : Society of Photo-optical Instrumentation Engineers,c2018 ISBN 9781510619135
    Language: English
    Keywords: Electronic books.
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  • 4
    Online Resource
    Online Resource
    Bellingham :Society of Photo-optical Instrumentation Engineers,
    UID:
    edoccha_9958898543402883
    Format: 1 online resource (123 pages)
    ISBN: 1-5106-1914-3
    Series Statement: SPIE Press monograph ; PM286
    Content: Many scientists and engineers consider themselves poor writers or find the writing process difficult. The good news is that you do not have to be a talented writer to produce a good scientific paper, but you do have to be a careful writer. In particular, writing for a peer-reviewed scientific or engineering journal requires learning and executing a specific formula for presenting scientific work. This book is all about teaching the style and conventions of writing for a peer-reviewed scientific journal. From structure to style, titles to tables, abstracts to author lists, this book gives practical advice about the process of writing a paper and getting it published.
    Note: Many scientists and engineers consider themselves poor writers or find the writing process difficult. The good news is that you do not have to be a talented writer to produce a good scientific paper, but you do have to be a careful writer. In particular, writing for a peer-reviewed scientific or engineering journal requires learning and executing a specific formula for presenting scientific work. This book is all about teaching the style and conventions of writing for a peer-reviewed scientific journal. From structure to style, titles to tables, abstracts to author lists, this book gives practical advice about the process of writing a paper and getting it published. , Preface -- Chapter 1. Getting started -- Chapter 2. Structure and organization -- Chapter 3. Language and style -- Chapter 4. Figures and tables -- Chapter 5. Citations -- Chapter 6. Abstract and title -- Chapter 7. What an editor looks for -- Chapter 8. Picking the right journal -- Chapter 9. Cover letter -- Chapter 10. The editorial review process -- Chapter 11. Review articles -- Chapter 12. The ethics of scientific publication -- Chapter 13. Authorship -- Chapter 14. Plagiarism -- Chapter 15. Double publication -- Chapter 16. Editorial ethics -- Appendix: A checklist for editors, reviewers, and authors. , Also available in print version.
    Additional Edition: ISBN 1-5106-1913-5
    Language: English
    Library Location Call Number Volume/Issue/Year Availability
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  • 5
    Book
    Book
    Bellingham, Wash. :SPIE Press,
    UID:
    kobvindex_ZIB000012048
    Format: XII, 122 S.
    ISBN: 0-8194-6207-1
    Series Statement: SPIE field guides 6
    Note: Includes bibliographical references and index
    Language: English
    Library Location Call Number Volume/Issue/Year Availability
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  • 6
    UID:
    kobvindex_ZIB000013639
    Format: XVII, 515 S.
    ISBN: 978-0-470-01893-4 , 978-0-470-72730-0
    Language: English
    Library Location Call Number Volume/Issue/Year Availability
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  • 7
    UID:
    b3kat_BV014116485
    Format: VII, 262 S. , Ill., graph. Darst.
    ISBN: 0819432210
    Series Statement: Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 3741
    Language: English
    Subjects: Engineering
    RVK:
    Keywords: Lithografie ; Konferenzschrift
    Library Location Call Number Volume/Issue/Year Availability
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  • 8
    Online Resource
    Online Resource
    Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :SPIE,
    UID:
    almahu_9947418302302882
    Format: 1 online resource (xii, 122 p. : ill.) : , digital file.
    ISBN: 9780819478214 (electronic)
    Series Statement: SPIE field guides ; FG06
    Content: The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.
    Note: "SPIE digital library." , Symbol glossary -- The lithography process -- Definition : semiconductor lithography -- Overview of the lithography Process -- Processing : substrate preparation -- Processing : photoresist spin coating -- Processing : post-apply bake -- Processing : alignment and exposure -- Processing : post-exposure bake -- Processing : development -- Processing : pattern transfer -- Image formation -- Maxwell's equations : the mathematics of light -- The plane wave and the phasor -- Basic imaging theory -- Diffraction -- Fraunhofer diffraction : examples -- The numerical aperture -- Fourier optics -- Spatial coherence and oblique illumination -- Partial coherence -- Aberrations -- Aberrations : the Zernike polynomial -- Aberrations : Zernike examples -- Chromatic aberration -- Horizontal-vertical (H-V) bias -- Defocus -- Flare -- Vector nature of light -- Polarization -- The optical invariant -- Immersion lithography : resolution -- Immersion lithography : depth of focus -- Imaging into a photoresist -- Standing waves: definition -- Standing waves: mathematics -- Fresnel reflectivity -- Swing curves -- Top antireflective coatings (TARC) -- Bottom antireflective coatings (BARC) -- Photoresist chemistry -- Novolak/DNQ resists -- Chemically amplified resists -- Absorption of light -- Photoresist bleaching and the Dill parameters -- Exposure kinetics -- Measuring the Dill ABC parameters -- Chemically amplified resist kinetics. , Diffusion in chemically amplified resists -- Acid loss mechanisms -- Post-apply bake effects -- Photoresist development kinetics -- Surface inhibition -- Developer temperature and concentration -- The development path -- Lithography control and optimization -- NILS : the normalized image log-slope -- NILS : the log-slope defocus curve -- NILS : image optimization -- NILS : exposure optimization -- NILS : PEB optimization -- NILS : development optimization -- NILS : total Process optimization -- Defining photoresist linewidth -- Critical dimension control -- Critical dimension control : effect on devices -- Overlay control -- Line edge roughness -- Metrology : critical dimension -- Metrology : overlay -- The process window -- Depth of focus -- Resolution -- Rayleigh criteria : resolution -- Rayleigh criteria : depth of focus -- Mask error enhancement factor (MEEF) -- Resolution enhancement technologies -- Phase-shift masks -- Phase-shift masks : alternating -- Phase-shift masks : attenuated -- Optical proximity effects -- Optical proximity correction (OPC) -- Off-axis illumination -- Lithography simulation -- Moore's law -- Next-generation lithography (NGL) -- Equation summary -- Glossary -- Index. , Also available in print version. , Mode of access: World Wide Web. , System requirements: Adobe Acrobat Reader.
    Additional Edition: ISBN 0819462071
    Language: English
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  • 9
    Online Resource
    Online Resource
    Chichester, West Sussex, England ; : Wiley,
    UID:
    almahu_9948312899202882
    Format: xvii, 515 p. : , ill.
    Edition: Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
    Language: English
    Keywords: Electronic books.
    Library Location Call Number Volume/Issue/Year Availability
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  • 10
    Online Resource
    Online Resource
    Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) :SPIE,
    UID:
    almahu_9947552301902882
    Format: 1 online resource (122 pages).
    ISBN: 9781510619142
    Series Statement: SPIE Press monograph ; PM286
    Content: Many scientists and engineers consider themselves poor writers or find the writing process difficult. The good news is that you do not have to be a talented writer to produce a good scientific paper, but you do have to be a careful writer. In particular, writing for a peer-reviewed scientific or engineering journal requires learning and executing a specific formula for presenting scientific work. This book is all about teaching the style and conventions of writing for a peer-reviewed scientific journal. From structure to style, titles to tables, abstracts to author lists, this book gives practical advice about the process of writing a paper and getting it published.
    Note: "SPIE Digital Library."--Website. , Preface -- Chapter 1. Getting started -- Chapter 2. Structure and organization -- Chapter 3. Language and style -- Chapter 4. Figures and tables -- Chapter 5. Citations -- Chapter 6. Abstract and title -- Chapter 7. What an editor looks for -- Chapter 8. Picking the right journal -- Chapter 9. Cover letter -- Chapter 10. The editorial review process -- Chapter 11. Review articles -- Chapter 12. The ethics of scientific publication -- Chapter 13. Authorship -- Chapter 14. Plagiarism -- Chapter 15. Double publication -- Chapter 16. Editorial ethics -- Appendix: A checklist for editors, reviewers, and authors. , Also available in print version. , Mode of access: World Wide Web. , System requirements: Adobe Acrobat Reader.
    Additional Edition: Print version ISBN 1510619135
    Additional Edition: ISBN 9781510619135
    Language: English
    Keywords: Electronic books.
    URL: SPIE
    Library Location Call Number Volume/Issue/Year Availability
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