UID:
almafu_9960141404202883
Format:
1 online resource (130 p.)
Edition:
Die Originalausgabe erscheint im Springer-Verlag Berlin-Heidelberg: New York in der Schriftenreihe „Topics in Current Chemistry”, Volume 94, Reprint 2021
ISBN:
9783112539545
Note:
Frontmatter --
,
Contents --
,
Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization --
,
The Mechanism and Kinetics of Plasma Polymerization --
,
Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas
,
In German.
Additional Edition:
ISBN 9783112539538
Language:
German
DOI:
10.1515/9783112539545
URL:
https://doi.org/10.1515/9783112539545
URL:
https://www.degruyter.com/isbn/9783112539545
URL:
https://doi.org/10.1515/9783112539545
URL:
https://www.degruyter.com/isbn/9783112539545
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